Brand Name: | ZMSH |
Model Number: | 4inch 4H-Semi SiC Wafer |
MOQ: | 10pieces |
Packaging Details: | Customizable Package |
Payment Terms: | T/T |
Parameter | Specification |
---|---|
Grade | Zero MPD |
Production | Standard Production |
Diameter | 99.5 mm~ 100.0 mm |
Thickness (4H-Semi) | 500 μm±15 μm | 500 μm±25 μm |
Wafer Orientation | Off axis: 4.0° toward <1120> ±0.5° for 4H-N, On axis: <0001>±0.5° for 4H-SI |
Micropipe Density (4H-Semi) | ≤ 1cm-2 | ≤ 5 cm-2 | ≤15 cm-2 |
Resistivity (4H-Semi) | ≥1E10 Ω*cm | ≥1E5 Ω*cm |
Primary Flat Orientation | {10-10} ±5.0° |
Primary Flat Length | 32.5 mm ± 2.0 mm |
Secondary Flat Length | 18.0 mm ± 2.0 mm |
Edge Exclusion | 3 mm |
LTV/TTV/Bow/Warp | ≤2.5 μm/≤5 μm/≤15 μm/≤30 μm | ≤10 μm/≤15 μm/≤25 μm/≤40 μm |
Roughness | Polish Ra≤1 nm | CMP Ra≤0.2 nm | Ra≤0.5 nm |