Semiconductor-Grade 6-Inch Sapphire Wafer, High-Purity Low-Defect Sapphire Substrate for GaN Epitaxy

Semiconductor-Grade 6-Inch Sapphire Wafer, High-Purity Low-Defect Sapphire Substrate for GaN Epitaxy

Product Description:

Our 6 inch sapphire wafer is made of high-purity single-crystal aluminum oxide (α-Al₂O₃), with standard C-plane (0001) orientation, and optional R-plane, A-plane and M-plane cuts. It is available in single-side polished (SSP) and double-side polished (DSP) finishes, with epi-ready surface quality.

Standard thickness ranges from 430μm to 1300μm, with total thickness variation (TTV) ＜5μm and surface roughness Ra ＜0.2nm. All wafers are produced and packed in Class 100 clean rooms, with notch or flat orientation marks. Custom specifications on thickness, tolerance and patterned structure (PSS) are fully supported for mass production and R&D needs.

Our premium sapphire wafers:

1.Material: 99.999% high-purity single-crystal Al₂O₃, first-class optical grade

2.Surface process: Proprietary CMP polishing; Ra ＜ 0.2 nm (C-plane), Ra ＜ 0.5 nm (A/M/R/N/V/(10-14) plane)
 

3.Cleanliness: Processed in Class 100 cleanroom, cleaned with ≥18 MΩ·cm ultrapure water
 

4.Packaging: 25 wafers per cassette / single-wafer pack, flexible for R&D and production
 

5.Traceability: Unique serial number assigned to each wafer for full lifecycle tracking
 

6.Supply: Standard specs in regular stock; compact carton for safe, cost-effective shipping

Product Parameters:

Applications:

1.Semiconductor LED Industry (GaN Substrate for MOCVD Epitaxy)

C-plane (0001) sapphire wafers are widely adopted in this field. R-plane (1-102) and M-plane (10-10) sapphire wafers are mainly used to grow non-polar and semi-polar planar epitaxial layers for improved luminous efficiency.

2.Growth of Group III-V and Group II-VI Compound Semiconductors

Typical materials include gallium nitride (GaN), aluminum nitride (AlN), indium nitride (InN) and other compound semiconductors.

3.Microelectronic IC Applications, Especially Ultra-High-Speed Integrated Circuits (SOS)

Silicon-on-Sapphire (SOS) is a process that achieves heteroepitaxial growth of silicon on R-plane (1-102) sapphire wafers.

4.Hybrid Microelectronics

Hybrid microelectronic products mainly consist of Hybrid Integrated Circuits (HIC) and Multi-Chip Modules (MCM), which set stringent requirements for substrate materials. With stable dielectric constant and low dielectric loss, sapphire substrates are the most commonly used substrate for HIC and the primary substrate for MCM. A-plane (11-20) sapphire substrates are typically used in this application.

Character:

Mechanical Properties: Mohs hardness of 9 (second only to diamond), high bending strength, excellent wear and deformation resistance, and outstanding dimensional stability under process stress.

Thermal Properties: Melting point up to 2053°C; performance remains undegraded at 1900°C in ambient air. With excellent thermal conductivity, it is fully compatible with harsh fabrication processes such as high-temperature epitaxy and annealing.

Chemical Properties: Highly chemically inert to strong acids, strong alkalis and most organic solvents; resistant to plasma corrosion, and adaptable to various wet and dry processes in semiconductor manufacturing.

Optical Properties: Transmission band covers the full spectrum from deep ultraviolet to mid-infrared. Featuring high transmittance and low optical loss in visible and ultraviolet bands, it fits perfectly for optoelectronic devices and precision optical window applications.

Electrical Properties: Excellent insulating material at room temperature, with stable dielectric constant and extremely low dielectric loss, making it an ideal substrate option for RF devices and hybrid integrated circuits.

Product Recommend:

8inch Sapphire Wafer DSP Al2O3 Single Crystal for LED Lighting

Precision 50.8mm 2inch 0.1mm 0.43mm Thickness Sapphire Wafer Orientation A-Plane M-Plane

Q&A:

Q: What are the unique advantages of sapphire wafers over silicon wafers?

A: Sapphire wafers feature higher high-temperature resistance, excellent electrical insulation, wide optical transmission band and superior chemical stability. They better fit the special needs of high-voltage, high-frequency and optoelectronic devices, serving as an irreplaceable complement to silicon substrates.

Q: What crystal orientations and polishing methods are available?

A: C-plane is kept in regular stock, while A/M/R and other orientations can be customized. SSP/DSP polishing and PSS patterned substrates are all supported.

Q: How do you guarantee packaging safety and surface cleanliness?

A: All wafers are packed in Class 100 cleanrooms and delivered in standard wafer cassettes. Each wafer is fully traceable, with reinforced outer cartons to avoid damage during transit.

About Us

ZMSH specializes in high-tech development, production, and sales of special optical glass and new crystal materials. Our products serve optical electronics, consumer electronics, and the. We offer Sapphire optical components, mobile phone lens covers, Ceramics, LT, Silicon Carbide SIC, Quartz, and semiconductor crystal wafers. With skilled expertise and cutting-edge equipment, we excel in non-standard product processing, aiming to be a leading optoelectronic materials high-tech enterprise.