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November 18, 2025
Category Connection: Ceramic Parts
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Tags:
#Mechanical Arm Alumina Ceramic #Suction Cup Alumina Ceramic #Al2O3 Alumina Ceramic
Brief: Watch this overview to discover why many professionals pay attention to the High-Purity CVD/SSiC Silicon Carbide Tray for Semiconductor Wafer Processing. Learn about its exceptional mechanical strength, thermal stability, and dimensional precision, designed for demanding industrial applications.
Related Product Features:
  • Engineered with multi-zone annular slots for weight reduction and heat flow optimization.
  • Features a reinforced radial rib network for enhanced mechanical strength and rotational stability.
  • High-precision machined surface ensures flatness and thickness uniformity for semiconductor applications.
  • Centralized mounting interface allows secure installation on rotating shafts and automated systems.
  • Structural reinforcement at the outer ring enhances vibration resistance and peripheral load stability.
  • Available in multiple high-performance materials including SSiC, RBSiC, alumina ceramic, and high-strength metals.
  • Ideal for semiconductor manufacturing, LED production, advanced material processing, and precision machinery.
  • Offers thermal efficiency, structural durability, process stability, and customizability for various industrial needs.
Faqs:
  • What is a SiC ceramic tray?
    A SiC ceramic tray is a precision carrier made from high-purity silicon carbide, designed for supporting, loading, and transporting wafers or substrates during semiconductor, LED, optical, and vacuum-process manufacturing. It offers exceptional thermal stability, mechanical strength, and deformation resistance under harsh environments.
  • What are the advantages of using SiC trays compared with quartz, graphite, or aluminum trays?
    SiC trays provide superior performance benefits including high temperature resistance up to 1600-1800°C, excellent thermal conductivity, outstanding mechanical strength, low thermal expansion, high corrosion resistance, and longer service life under continuous high-stress manufacturing conditions.
  • What applications are SiC ceramic trays mainly used for?
    SiC trays are widely used in semiconductor wafer handling, LPCVD, PECVD, MOCVD thermal processing, annealing, diffusion, oxidation, and epitaxy processes, sapphire wafer/optical substrate loading, high-vacuum and high-temperature environments, and precision CMP or polishing fixture platforms.
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