Ion Beam Polishing Machine
Atomic-Level Precision · Non-Contact Processing · Ultra-Smooth Surfaces

Product Overview of Ion Beam Polishing Machine
 

The CNC Ion Beam Figuring/Polishing Machine operates on the principle of ion sputtering. Under vacuum conditions, the ion source generates a plasma beam, which is accelerated into an ion beam that bombards the workpiece surface for atomic-level material removal, enabling ultra-precise fabrication of optical components.

This technology offers non-contact processing, free from mechanical stress or subsurface damage, and is ideal for high-precision optics in astronomy, aerospace, semiconductors, and scientific research.

Working Principle of Ion Beam Polishing Machine

• Ion Generation – Inert gas (e.g., argon) is introduced into the vacuum chamber and ionized by an electric discharge field.

• Ion Acceleration & Beam Formation – Ions are accelerated to hundreds or thousands of electron volts (eV) and shaped into a stable beam spot by focusing optics.

• Material Removal – The ion beam physically sputters surface atoms without chemical reactions.

• Error Measurement & Path Planning – Surface figure errors are measured via interferometry, then removal functions are used to calculate beam dwell times and generate processing paths.

• Closed-Loop Correction – Processing and measurement cycles are repeated until RMS/PV targets are achieved.

Equipment Features of Ion Beam Polishing Machine

• Non-contact processing – Capable of handling all surface shapes

• Stable removal rate – Sub-nanometer figure correction accuracy

• No subsurface damage – Preserves optical integrity

• High consistency – Minimal fluctuation across materials of varying hardness

• Low/Medium frequency correction – No mid-high frequency error generation

• Low maintenance cost – Long-term continuous operation with minimal downtime

Equipment Processing Capacity of Ion Beam Polishing Machine

Available Surfaces:

• Simple Optical Components: Plane, sphere, prism

• Complex Optical Components: Symmetric/asymmetric asphere, off-axis asphere, cylindrical surface

• Special Optical Components: Ultra-thin optics, slat optics, hemispherical optics, conformal optics, phase plates, freeform surfaces, other custom shapes

Available Materials:

• Common optical glass: Quartz, Microcrystalline, K9, etc.

• Infrared optics: Silicon, Germanium, etc.

• Metals: Aluminum, Stainless Steel, Titanium Alloy, etc.

• Crystal materials: YAG, Single-crystal Silicon Carbide, etc.

• Other hard/brittle materials: Silicon Carbide, etc.

Surface Quality / Accuracy:

• PV < 10 nm

• RMS ≤ 0.5 nm

Product Advantages of Ion Beam Polishing Machine

• Atomic-level removal precision – Enables ultra-smooth surfaces for demanding optical systems

• Versatile shape compatibility – From flat optics to complex freeforms

• Broad material adaptability – From precision crystals to hard ceramics and metals

• Large aperture capability – Processes optics up to Φ4000 mm

• Extended stable operation – Runs 3–5 weeks without vacuum chamber maintenance

Typical Models of Ion Beam Polishing Machine

• IBF350 / IBF750 / IBF1000 / IBF1600 / IBF2000 / IBF4000

• Motion Axes: 3-axis / 5-axis

• Max Workpiece Size: up to Φ4000 mm

Case 1 – Standard Flat Mirror

• Workpiece: D630 mm Quartz flat

• Result: PV 46.4 nm; RMS 4.63 nm

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Case 2 – X-ray Reflective Mirror

• Workpiece: 150 × 30 mm Silicon flat

• Result: PV 8.3 nm; RMS 0.379 nm; Slope 0.13 µrad

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Case 3 – Off-Axis Mirror

• Workpiece: D326 mm Off-axis ground mirror

• Result: PV 35.9 nm; RMS 3.9 nm

Application Fields of Ion Beam Polishing Machine

• Astronomical optics – Large telescope primary/secondary mirrors

• Space optics – Satellite remote sensing, deep-space imaging

• High-power laser systems – ICF optics, beam shaping

• Semiconductor optics – Lithography lenses & mirrors

• Scientific instrumentation – X-ray/neutron mirrors, metrology standard components

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About Us

ZMSH specializes in high-tech development, production, and sales of special optical glass and new crystal materials. Our products serve optical electronics, consumer electronics, and the military. We offer Sapphire optical components, mobile phone lens covers, Ceramics, LT, Silicon Carbide SIC, Quartz, and semiconductor crystal wafers. With skilled expertise and cutting-edge equipment, we excel in non-standard product processing, aiming to be a leading optoelectronic materials high-tech enterprise.