Special Orientation SSP/ DSP A-axis <11-20> R-axis <1-102> M-axis<10-10> 2inch 3inch 4inch 6inch sapphire substrates wafers for GaN epitaxial growth；0.1mm/100um 2inch sapphire c-axis substrates
The Detail for 2inch c-axis wafers
Size: 2 inch DSP-430-C -axis
Material: KY Sapphire Al2O3 single crystal without bubble；color ；
Orientation:C-cut,M-axis off 0.0+/-0.2°；
Diameter: 50.8 +/-0.2mm ；
Thickness:100 ± 15 um ；
OF Flat:16.0 +/- 1.0 mm ； OR round shape
OF orientation: a-axis
Surface: SSP /dsp Epi-ready Polished ；
TTV<= 10um ；BOW<= 20um ； Warp<= 20 um ；
Front Surface Roughness (Ra) Ra <= 0.3 nm ； or double side
Back Surface Roughness (Ra) Ra <0.3nm
Edge: from 1mm ；
TYPICAL CHOICES FOR PART ORIENTATION:
Zero Degree: The direction of view is parallel to the optical axis of the crystal
90 Degree: The direction of view is perpendicular to the optical axis of the crystal
C-Axis: In a rod, the direction along its length. In a window, the direction perpendicular to the face.
M-Plane: The plane containing the optic axis (C) and inclined 30 degrees to the A-axis
A-Plane: The plane that is perpendicular to the A-axis, containing the C-axis
R-Plane: A plane inclined 57.5667 degrees to the optic axis in the same zone as the M-plane.
Random: There is no specified relationship between the part and the crystalline orientation. The part is manufactured without concern about orientation.
2 inch C-plane sapphire wafer SSP/DSP
3 inch C-plane sapphire wafer SSP/DSP
4 inch C-plane sapphire wafer SSP/DSP
6 inch C-plane sapphire wafer SSP/DSP
A-plane (1120) sapphire wafer
R-plane (1102) sapphire wafer
M-plane (1010) sapphire wafer
C-axis with a 0.5°~ 10° offcut, toward A-axis or M-axis
Other customized orientation
10x10x0.5mm sapphire wafer
20x20x0.5mm sapphire wafer
Ultra thin (100um) 2inch sapphire wafer
8 inch sapphire wafer
Patterned Sapphire Substrate (PSS)
2 inch C-plane PSS
4 inch C-plane PSS
DSP C-AXIS 0.1mm/ 0.175mm/0.2mm/0.3mm/0.4mm/0.5mm/1.0mmt
SSP C-axis 0.2/0.43mm
(DSP＆SSP) A-axis/M-axis/R-axis 0.43mm
DSP/ SSP C-axis 0.43mm/0.5mm
dsp c-axis 0.4mm/ 0.5mm/1.0mm
ssp c-axis 0.5mm/0.65mm/1.0mmt
ssp c-axis 1.0mm/1.3mmm
dsp c-axis 0.65mm/ 0.8mm/1.0mmt
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