SiC Ceramic Fork Custom Made Precision Structural Component Handle Wafers Optical Component
Product Details:
Place of Origin: | China |
Brand Name: | ZMSH |
Payment & Shipping Terms:
Minimum Order Quantity: | 1 |
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Price: | case by case |
Packaging Details: | foamed plastic+carton |
Delivery Time: | 4weeks |
Payment Terms: | T/T |
Supply Ability: | 1pcs/month |
Detail Information |
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High Hardness: | With A Mohs Hardness Of Up To 9.3 | Low Coefficient Of Thermal Expansion: | Typically Around 4.0 × 10⁻⁶ /K |
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Excellent Thermal Conductivity: | Thermal Conductivity Of 120–180 W/(m·K) | Low Density: | At Approximately 3.1 G/cm³ |
Highlight: | custom made SiC ceramic fork,SIC ceramic handle wafers,SiC ceramic precision structural component |
Product Description
SiC ceramic fork custom-made precision structural component, handle wafers, optical component
Abstract of SiC ceramic fork
SiC Ceramic Fork Arm is a structural component made from advanced silicon
carbide ceramic material. It is primarily used in precision equipment requiring high rigidity, low thermal expansion coefficient, and high wear resistance. The "fork arm" shape is commonly found in high-end optical devices, semiconductor processing equipment, and automated handling systems, serving as a support, positioning, transmission, or clamping element. Compared to traditional metal materials, silicon carbide ceramic offers significant advantages in mechanical performance, thermal stability, and corrosion resistance, and has gradually become a key functional component in modern high-precision manufacturing.
Attribute table of SiC ceramic fork
Property | Typical Value | Unit | Remarks |
Material | Sintered Silicon Carbide (SSiC) | – | High-purity, high-density grade |
Density | 3.10 – 3.15 | g/cm³ | |
Hardness | ≥ 2200 | HV0.5 (Vickers) | One of the hardest engineering ceramics |
Flexural Strength | ≥ 400 | MPa | 4-point bending test |
Compressive Strength | ≥ 2000 | MPa | |
Young's Modulus | 400 – 450 | GPa | Ultra-high stiffness |
Thermal Conductivity | 120 – 180 | W/(m·K) | Excellent for heat dissipation |
Coefficient of Thermal Expansion | ~4.0 × 10⁻⁶ | /K (25–1000 °C) | Very low; ideal for thermal stability |
Maximum Operating Temperature | 1400 – 1600 | °C | In air; higher in inert atmosphere |
Electrical Resistivity | > 10¹⁴ | Ω·cm | Insulating ceramic |
Chemical Resistance | Excellent | – | Resistant to acids, alkalis, and solvents |
Surface Roughness (after polishing) | < 0.02 | μm Ra | Optional for contact surfaces |
Cleanroom Compatibility | Class 10 – 1000 | – | Suitable for semiconductor and optics use |
Design and Manufacturing of SiC Ceramic Fork Arms
Structural Design
SiC fork arms are custom-designed according to application requirements. Common forms include "U-shaped" or "T-shaped" arms used for:
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Wafer handling
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Probe card positioning
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Optical module support
Key considerations in design include:
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Load capacity and stress distribution
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Thermal stress compensation
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Precision mounting interfaces
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Cleanroom compatibility
Processing Techniques
The manufacturing process involves several critical steps:
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Powder preparation
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Forming (dry pressing, isostatic pressing, or casting)
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Sintering (e.g., pressureless sintering, reaction bonding)
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Machining (grinding, laser drilling, EDM)
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Surface finishing (polishing, coating, laser marking)
Process Flow Diagram for Preparation of SiC Ceramic Components
Application Scenarios of SiC ceramic fork
Semiconductor Equipment
SiC ceramic fork arms are commonly used in wafer handling systems for processes such as photolithography, etching, and packaging. Advantages include:
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Non-contaminating surface
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High temperature resistance
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Excellent chemical durability
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Compatibility with Class 10–1000 cleanrooms
Used in:
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EFEM and FOUP load ports
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6", 8", and 12" wafer transport
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Vacuum pick-and-place systems
Optical Systems & Telescopes
In high-precision optical instruments, SiC fork arms provide:
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Rigid support for mirrors and lenses
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Stable alignment under thermal variations
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Lightweight structures for dynamic positioning
They are often used in:
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Interferometers
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Space telescopes
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Laser scanning systems
Aerospace & Defense of of SiC ceramic fork
In aerospace systems, SiC fork arms are valued for
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Lightweight and stiffness under vibration
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Resistance to radiation and thermal shock
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Structural stability in low-earth orbit conditions
Typical roles include payload supports, gimbal linkages, and optical mounts.
Robotic & Automation Systems
In cleanroom automation environments, SiC fork arms are used as end-effectors or grippers, offering:
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Non-conductive, non-particle-generating surfaces
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Long service life in abrasive or corrosive environments
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Resistance to outgassing in vacuum chambers
Customization & Technical Support
As a non-standard precision component, SiC ceramic fork arms are typically customized based on user requirements. Customizable parameters include:
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Overall dimensions (length, width, thickness)
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Opening size and angle
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Surface finish and roughness
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Chamfers, holes, slots
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Wafer compatibility (6", 8", 12")
We support full-cycle services including drawing review, FEM simulation for mechanical behavior, and prototype verification to ensure performance and compatibility.
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